Pressure
Freescale Semiconductor
MPX5100
Rev 13, 05/2010
Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated and
Calibrated
The MPX5100 series piezoresistive transducer is a state-of-the-art monolithic
silicon pressure sensor designed for a wide range of applications, but particularly
those employing a microcontroller or microprocessor with A/D inputs. This patented,
single element transducer combines advanced micromachining techniques, thin-film
metallization, and bipolar processing to provide an accurate, high level analog
output signal that is proportional to the applied pressure.
Features
• 2.5% Maximum Error over 0° to 85°C
• Ideally suited for Microprocessor or Microcontroller-Based Systems
• Patented Silicon Shear Stress Strain Gauge
• Available in Absolute, Differential and Gauge Configuration
• Durable Epoxy Unibody Element
• Easy-to-Use Chip Carrier Option
MPX5100
MPXV5100
Series
0 to 100 kPa (0 to 14.5 psi)
15 to 115 kPa (2.2 to 16.7 psi)
0.2 to 4.7 V Output
Typical Applications
• Patient Monitoring
• Process Control
• Pump/Motor Control
• Pressure Switching
Device Name
Case
No.
Unibody Package (MPX5100 Series)
None
MPX5100A
MPX5100AP
867
•
867B
MPX5100D
MPX5100DP
867
•
867C
MPX5100GP
867B
Small Outline Package (MPXV5100 Series)
MPXV5100GC6U
MPXV5100GC7U
MPXV5100DP
MPXV5100GP
482A
482C
1351
1369
ORDERING INFORMATION
# of Ports
Single
Dual
Gauge
Pressure Type
Differential Absolute
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
Device
Marking
MPX5100A
MPX5100AP
MPX5100D
MPX5100DP
MPX5100GP
MPXV5100G
MPXV5100G
MPXV5100DP
MPXV5100GP
© Freescale Semiconductor, Inc., 2005-2010. All rights reserved.