W6NXD3L-0000 データシートの表示（PDF） - Cree, Inc

部品番号

コンポーネント説明

メーカー

W6NXD3L-0000

Silicon Carbide Substrates

Cree, Inc 

Standard Specifications

Effective December 1998 • Revised March 2003 • Page 9

76.2mm Diameter Substrate Specifications

SUBSTRATE PROPERTY

Diameter

Thickness, Centerpoint

4H On and Off-Axis

Semi-Insulating

6H On-Axis

Dopant

Primary Flat Length

Secondary Flat Length

Surface Orientation

4H and 6H On-Axis

4H Off-Axis

Surface Treatment

Orthogonal Misorientation

Primary Flat Orientation

Secondary Flat Orientation

Carbon Face

Silicon Face

Package

CREE STANDARD

3.000" ± 0.015"

76.2mm ± 0.38mm

0.0138" ± 0.001"

350.0µm ± 25.4µm

0.0145" ± 0.0025"

368.0µm ± 64.0µm

0.010" ± 0.001"

254.0µm ± 25.4µm

n-type: Nitrogen

0.875" ± 0.125"

22.22mm ± 3.17mm

0.440" ± 0.060"

11.18mm ± 1.52mm

{0001} ± 0.5°

4.0° toward <1120> ± 0.5°

8.0° toward <1120> ± 0.5°

Silicon face polish unless otherwise specified

± 5°

<1120> ± 5°

90° CCW from Primary ± 5°

90° CW from Primary ± 5°

FLUOROWARE® Single Wafer Container

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