MPX10 データシートの表示（PDF） - Freescale Semiconductor

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MPX10

10 kPa Uncompensated Silicon Pressure Sensors

Freescale Semiconductor 

Table 2. Operating Characteristics (VS = 3.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2)

Characteristic

Differential Pressure Range(1)

Supply Voltage(2)

Supply Current

Full Scale Span(3)

Offset(4)

Sensitivity

Linearity(5)

Pressure Hysteresis(5) (0 to 10 kPa)

Temperature Hysteresis(5) (–40°C to +125°C)

Temperature Coefficient of Full Scale Span(5)

Temperature Coefficient of Offset(5)

Temperature Coefficient of Resistance(5)

Input Impedance

Output Impedance

Response Time(6) (10% to 90%)

Warm-Up Time(7)

Offset Stability(8)

Symbol

POP

VS

IO

VFSS

VOFF

∆V/∆Ρ

—

—

—

TCVFSS

TCVOFF

TCR

ZIN

ZOUT

tR

—

—

Min

0

—

—

20

0

—

–1.0

—

—

–0.22

—

0.28

400

750

—

—

—

Typ

—

3.0

6.0

35

20

3.5

—

±0.1

±0.5

—

±15

—

—

—

1.0

20

±0.5

Max

10

6.0

—

50

35

—

1.0

—

—

–0.16

—

0.34

550

1250

—

—

—

Units

kPa

VDC

mAdc

mV

mV

mV/kPa

%VFSS

%VFSS

%VFSS

%VFSS/°C

µV/°C

%/ZIN/°C

Ω

Ω

ms

ms

%VFSS

1. 1.0 kPa (kiloPascal) equals 0.145 psi.

2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional

error due to device self-heating.

3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the

minimum related pressure.

4. Offset (VOFF) is defined as the output voltage at the minimum rated pressure.

5. Accuracy (error budget) consists of the following:

• Linearity:

Output deviation from a straight line relationship with pressure, using end point method, over the specified

pressure range.

• Temperature Hysteresis:Output deviation at any temperature within the operating temperature range, after the temperature is cycled to

and from the minimum or maximum operating temperature points, with zero differential pressure applied.

• Pressure Hysteresis: Output deviation at any pressure with the specified range, when this pressure is cycled to and from the minimum

or maximum rated pressure at 25°C.

• TcSpan:

Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.

• TcOffset:

Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative

to 25°C.

• TCR:

ZIN deviation with minimum rated pressure applied, over the temperature range of -40°C to ±125°C, relative to 25°C.

6. Response Time is defined as the time form the incremental change in the output to go from 10% to 90% of its final value when subjected to

a specified step change in pressure.

7. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the pressure is stabilized.

8. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.

Sensors

Freescale Semiconductor

MPX10

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