MPX5100 データシートの表示（PDF） - Freescale Semiconductor

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MPX5100

Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated, and Calibrated

Freescale Semiconductor 

VS

Sensing

Element

Thin Film

Gain Stage # 2

Temperature

and Ground

Compensation

Reference

VOUT

and Gain

Shift Circuitry

Stage # 1

TABLE 1. Maximum Ratings(1)

Pins 1 and 5 through 8 are NO CONNECTS for small outline packages

GND

Pins 4, 5, and 6 are NO CONNECTS for unibody packages

Figure 1. Fully Integrated Pressure Sensor Schematic

Rating

Maximum Pressure (P1 > P2)

Storage Temperature

Operating Temperature

Symbol

PMAX

TSTG

TA

Value

400

-40° to +125°C

-40° to +125°C

Unit

kPa

°C

°C

1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.

TABLE 2. Operating Characteristics (VS = 5.0 VDC, TA = 25°C unless otherwise noted, P1 > P2. Decoupling circuit shown in

Figure 4 required to meet electrical specifications.)

Characteristic

Pressure Range(1)

Gauge, Differential: MPX5100D/MPX5100G/MPXV5100G

Absolute: MPX5100A

Supply Voltage(2)

Supply Current

Minimum Pressure Offset(3)

@ VS = 5.0 V

(0 to 85°C)

Full Scale Output(4)

@ VS = 5.0 V

Differential and Absolute (0 to 85°C)

Full Scale Span(5)

@ VS = 5.0 V

Differential and Absolute (0 to 85°C)

Accuracy(6)

Sensitivity

Response Time(7)

Output Source Current at Full Scale Output

Warm-Up Time(8)

Offset Stability(9)

Symbol

POP

VS

IO

VOFF

VFSO

VFSS

—

V/P

tR

IO+

—

—

Min

0

15

4.75

—

0.088

4.587

—

—

—

—

—

—

—

Typ

—

—

5.0

7.0

0.20

4.700

4.500

—

45

1.0

0.1

20

±0.5

Max

100

115

5.25

10

0.313

4.813

—

±2.5

—

—

—

—

—

Unit

kPa

VDC

mAdc

VDC

VDC

VDC

%VFSS

mV/kPa

ms

mAdc

ms

%VFSS

1. 1 kPa (kiloPascal) equals 0.145 psi.

2. Device is ratiometric within this specified excitation range.

3. Offset (VOFF) is defined as the output voltage at the minimum rated pressure.

4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure.

5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the

minimum rated pressure.

6. Accuracy (error budget) consists of the following:

• Linearity:

Output deviation from a straight line relationship with pressure over the specified pressure range.

• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to

and from the minimum or maximum operating temperature points, with zero differential pressure applied.

• Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum

or maximum rated pressure at 25°C.

• TcSpan:

Output deviation over the temperature range of 0° to 85°C, relative to 25°C.

• TcOffset:

Output deviation with minimum pressure applied over the temperature range of 0° to 85°C, relative to 25°C.

• Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS at 25°C.

MPX5100

2

Sensors

Freescale Semiconductor

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