SM5103-030-G データシートの表示（PDF） - Unspecified

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SM5103-030-G

HIGH SENSITIVITY, LOW-PRESSURE SILICON DIE

Unspecified 

SILICON

MICROSTRUCTURES

INCORPORATED

• HIGH SENSITIVITY, LOW-PRESSURE SILICON DIE

SM5103

Low-Pressure Die

DESCRIPTION

The SM5103 is a silicon micro-machined,

piezoresistive low pressure sensing chip.

These devices are available in full-scale

ranges from 0.3 to 3.0 psi and are ideal for

OEM and high volume applications.

Provided in die form, these sensors can be

mounted on ceramic or PC board substrates

as part of an OEM system. They also may

be packaged into proprietary or application-

specified sensor lines.

Die are probed, inked and diced, and

shipped on tape.

Custom pressure ranges available in high-

volume applications.

FEATURES

• Low Pressure (from 0-0.3 to 0-3.0 PSI)

• High Performance at Low Pressures

• Constant Current or Constant Voltage

Drive

• High Volume, Low Cost

• High Millivolt Output

APPLICATIONS

• Air Flow

• Level Detection

• HVAC

• Instrumentation

• Gas Analysis

Rev 1.2 8_02

 2001-2002

Silicon Microstructures, Inc. ♦ 1701 McCarthy Blvd. ♦ Milpitas, CA 95035 USA

Tel: 408-577-0100 ♦ Fax: 408-577-0123 ♦ Sales@Si-Micro.Com ♦ WWW.Si-Micro.Com

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