B1541A-002 データシートの表示（PDF） - HP => Agilent Technologies

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B1541A-002

Semiconductor Device Analyzer

HP => Agilent Technologies 

Basic Features

• PC-based instrument with touch screen

interface; optional USB keyboard and

mouse available

• EasyEXPERT software with over 200

categorized application tests supplied

with the instrument

• Performs current versus voltage (IV)

measurements

• Performs capacitance versus voltage

(CV), capacitance versus time (Ct)

and capacitance versus frequency (Cf)

measurements

• Performs quasi-static CV (QSCV)

measurements

• High voltage pulse forcing up to 40 V

with ALWG and voltage monitor

capabilities.

• Performs fast IV measurement synchro-

nized with the applied waveforms for

accurate transient IV or time-domain

measurements

• Front-panel Classic Test measurement

modes supported: single-channel sweep,

multi-channel sweep, time sampling,

list sweep, CV sweep and direct control

(GPIB FLEX)

• GUI-based control of the Agilent

B2200A, and B2201A switching matrices

• Modular mainframe with ten module

slots and one 4.2 A ground unit

• Multiple source/monitor unit (SMU)

types available: medium power

(MPSMU), high-power (HPSMU), and

high-resolution (HRSMU)

B1500A specification

• Multi-frequency capacitance measure-

ment unit (MFCMU) available

• High-voltage semiconductor pulse

generator unit (HV-SPGU) available

• Waveform generator/fast measurement

unit (WGFMU) available

• High-resolution, analog-to-digital

converter (ADC) available to all installed

SMUs

• High-speed ADC present on each

installed SMU

• SMU/AUX path switching supported on

the atto-sense and switch unit (ASU)

• SMU/MFCMU switching supported

using SMU CMU unify unit (SCUU) and

guard switch unit (GSWU)

• MFCMU automatically identifies

capacitance measurement accessories

• WGFMU/SMU path switching supported

on the remote-sense and switch unit

(RSU)

• GPIB port for instrument control

• Self-test, self-calibration, diagnostics

Specification conditions

This document lists specifications and

supplemental information for the B1500A

and its associated modules. The specifica-

tions are the standards against which the

B1500A and its associated modules are

tested. When the B1500A and any of its

associated modules are shipped from the

factory, they meet the specifications. The

“supplemental” information and “typical”

entries in the following specifications are

not warranted, but provide useful informa-

tion about the functions and performance

of the instrument.

The measurement and output accuracy

are specified at the rear panel connector

terminals when referenced to the Zero

Check terminal. The B1530A WGFMU

measurement and output accuracy are

specified at the output terminal of the RSU.

Accuracy is specified under the following

conditions:

1. Temperature: 23 °C ±5 °C

2. Humidity: 20 % to 60 %

3. After 40 minute warm-up followed by

self-calibration

4. Ambient temperature change less than

±1 °C after self-calibration execution,

not applicable for MFCMU and WGFMU

5. Measurement made within one hour

after self-calibration execution, not

applicable for MFCMU and WGFMU

6. Calibration period: 1 year

7. SMU integration time setting:

1 PLC (1 nA to 1A range, voltage range)

20 PLC (100 pA range)

50 PLC (1 pA to 10 pA range)

Averaging of high-speed ADC:

128 samples per 1 PLC

8. SMU filter: ON (for SMUs)

9. SMU measurement terminal connection:

Kelvin connection

10. WGFMU load capacitance: 25 pF or less

Note: Agilent Technologies is responsible

for removing, installing, and replacing the

B1500A modules. Contact your nearest

Agilent Technologies to install and

calibrate the B1500A modules

Supported plug-in modules

The B1500A supports ten slots for plug-in modules.

Part Description

Slots Range of operation

Measure

number

occupied

resolution

B1510A High power source/monitor unit (HPSMU)

2 -200 V to 200 V, -1 A to 1 A

2 µV, 10 fA

B1511A Medium power source/monitor unit (MPSMU)

1 -100 V to 100 V, -100 mA to 100 mA 0.5 µV, 10 fA

B1517A High resolution source/monitor unit (HRSMU)

1 -100 V to 100 V, -100 mA to 100 mA 0.5 µV, 1 fA

E5288A¹ Atto-sense and switch unit (ASU)

— -100 V to 100 V, -100 mA to 100 mA 0.5 µV, 100 aA

B1520A Multi frequency capacitance measurement unit (MFCMU)

1 1 kHz to 5 MHz

0.035 fFrms²

B1525A High voltage semiconductor pulse generator unit (HV-SPGU) 1 ±40 V (80 Vp-p)

50 μV

B1530A Waveform generator/fast measurement unit (WGFMU)

1 PG Mode: -3 V to 3 V, -5 V to 5 V 0.014 % of the

Fast IV Mode: -3 V to 3 V, -5 V to range 3

5 V, 0 V to 10 V, -10 V to 0 V

1. This is connected with the B1517A high resolution SMU.

2. Dispersion of measurement values when connecting a DUT 10 pF to the measurement terminals under the measurement condition of frequency

1 MHz, signal level 250 mVac, and measurement time 1 PLC. The display resolution is 0.000001 fF at 1 fF order by 6 digits display.

3. Display resolution

2

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