B1541A-001 データシートの表示（PDF） - HP => Agilent Technologies

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B1541A-001

Semiconductor Device Analyzer

HP => Agilent Technologies 

MFCMU (multi frequency capacitance measurement unit) module specifications

Measurement functions

Measurement parameters:

Cp-G, Cp-D, Cp-Q, Cp-Rp, Cs-Rs, Cs-D,

Cs-Q, Lp-G, Lp-D, Lp-Q, Lp-Rp, Ls-Rs,

Ls-D, Ls-Q, R-X, G-B, Z-θ, Y-θ

Ranging:

Auto and fixed

Measurement terminal:

Four-terminal pair configuration, four

BNC (female) connectors

Cable length:

1.5 m or 3 m, automatic identification of

accessories

Test signal

Frequency:

Range: 1 kHz to 5 MHz

Resolution: 1 mHz (minimum)

Accuracy: ±0.008 %

Output signal level:

Range: 10 mVrms to 250 mVrms

Resolution: 1 mVrms

Accuracy:

±(10.0 % + 1 mVrms)

at the measurement port of the MFCMU

±(15.0 % + 1 mVrms)

at the measurement port of the MFCMU

cable (1.5 m or 3.0 m)

Output impedance: 50 Ω, typical

Signal level monitor:

Range: 10 mVrms to 250 mVrms

Accuracy (open load):

±(10.0 % of reading + 1 mVrms)

at the measurement port of the MFCMU

±(15.0 % of reading + 1 mVrms)

at the measurement port of the MFCMU

cable (1.5 m or 3 m)

DC bias function

DC bias:

Range: 0 to ±25 V

Resolution: 1 mV

Accuracy: ±(0.5 % + 5.0 mV) at the

measurement port of the MFCMU or the

MFCMU cable (1.5 m or 3.0 m)

Maximum DC bias current

(supplemental information)

Impedance range

Maximum DC

bias current

50 Ω

10 mA

100 Ω

10 mA

300 Ω

10 mA

1 kΩ

1 mA

3 kΩ

1 mA

10 kΩ

100 µA

30 kΩ

100 µA

100 kΩ

10 µA

300 kΩ

10 µA

Output impedance: 50 Ω, typical

DC bias monitor:

Range: 0 to ±25 V

Accuracy (open load):

±(0.2 % of reading + 10.0 mV) at the

measurement port of the MFCMU or the

MFCMU cable (1.5 m or 3.0 m)

Sweep characteristics

Available sweep parameters:

Oscillator level, DC bias voltage,

frequency

Sweep type: linear, log

Sweep mode: single, double

Sweep direction: up, down

Number of measurement points:

Maximum 1001 points

Measurement accuracy

The following parameters are used to

express the impedance measurement

accuracy at the measurement port of

the MFCMU or the MFCMU cable

(1.5 m or 3.0 m).

ZX: Impedance measurement value (Ω)

DX: Measurement value of D

E = EP’ + (ZS’/|ZX| + YO’|ZX|) x 100 (%)

EP’ = EPL + EPOSC + EP (%)

YO’ = YOL + YOSC + YO (S)

ZS’ = ZSL + ZOSC + ZS (Ω)

|Z| accuracy

±E (%)

θ accuracy

±E/100 (rad)

C accuracy

at DX ≤ 0.1

±E (%)

at DX > 0.1

±E x √¯(¯1¯+¯¯D¯X¯2) (%)

D accuracy

at DX ≤ 0.1

±E/100

at DX > 0.1

±E x (1 + DX)/100

G accuracy

at DX ≤ 0.1

±E/ DX (%)

at DX > 0.1

±E x √¯(¯1¯+¯¯D¯X¯2) /DX (%)

Note: measurement accuracy is specified

under the following conditions:

Temperature: 23 °C ±5 °C

Integration time: 1 PLC or 16 PLC

8

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